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Thin-film engineering of mechanical fragmentation properties of atomic-layer-deposited metal oxides
Ruoho, M., Niemelä, J. P., Guerra-Nunez, C., Tarasiuk, N., Robertson, G., Taylor, A. A., … Utke, I. (2020). Thin-film engineering of mechanical fragmentation properties of atomic-layer-deposited metal oxides. Nanomaterials, 10(3), 558 (16 pp.). https://doi.org/10.3390/nano10030558
Interaction of ALD deposited Al<sub>2</sub>0<sub>3</sub> films with remote fluorine plasma
Ruoho, M., Guerra-Nuñez, C., Polyakov, M., Maeder, X., Spring, P., Andreaus, B., & Utke, I. (2017). Interaction of ALD deposited Al203 films with remote fluorine plasma. Presented at the E-MRS fall meeting 2017. Warsaw, Poland: E-MRS.