Active Filters

  • (-) Empa Authors = Hug, Hans J.
  • (-) Keywords = Al-O-N
Search Results 1 - 2 of 2
  • RSS Feed
Select Page
A setup for arc-free reactive DC sputter deposition of Al-O-N
Fischer, M., Trant, M., Thorwarth, K., Patscheider, J., & Hug, H. J. (2019). A setup for arc-free reactive DC sputter deposition of Al-O-N. Surface and Coatings Technology, 362, 220-224. https://doi.org/10.1016/j.surfcoat.2019.01.082
Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films
Fischer, M., Trant, M., Thorwarth, K., Crockett, R., Patscheider, J., & Hug, H. J. (2019). Understanding the microstructural evolution and mechanical properties of transparent Al-O-N and Al-Si-O-N films. Science and Technology of Advanced Materials, 20(1), 1031-1042. https://doi.org/10.1080/14686996.2019.1666425