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Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al<sub>2</sub>O<sub>3</sub> films grown by thermal atomic layer deposition
Cancellieri, C., Gramatte, S., Politano, O., Lapeyre, L., Klimashin, F. F., Mackosz, K., … Jeurgens, L. P. H. (2024). Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al2O3 films grown by thermal atomic layer deposition. Surface and Interface Analysis. https://doi.org/10.1002/sia.7282
Optimizing atomic layer deposition processes with nanowire-assisted TEM analysis
Schweizer, P., Vogl, L. M., Maeder, X., Utke, I., & Michler, J. (2024). Optimizing atomic layer deposition processes with nanowire-assisted TEM analysis. Advanced Materials Interfaces. https://doi.org/10.1002/admi.202301064
Unraveling the highly plastic behavior of ALD‐aluminum oxide encapsulations by small‐scale tensile testing
Vogl, L. M., Schweizer, P., Minor, A. M., Michler, J., & Utke, I. (2024). Unraveling the highly plastic behavior of ALD‐aluminum oxide encapsulations by small‐scale tensile testing. Advanced Engineering Materials. https://doi.org/10.1002/adem.202302220
Roadmap for focused ion beam technologies
Höflich, K., Hobler, G., Allen, F. I., Wirtz, T., Rius, G., McElwee-White, L., … Hlawacek, G. (2023). Roadmap for focused ion beam technologies. Applied Physics Reviews, 10(4), 041311 (93 pp.). https://doi.org/10.1063/5.0162597
Ligand size and carbon-chain length study of silver carboxylates in focused electron-beam-induced deposition
Jurczyk, J., Höflich, K., Madajska, K., Berger, L., Brockhuis, L., Edwards, T. E. J., … Utke, I. (2023). Ligand size and carbon-chain length study of silver carboxylates in focused electron-beam-induced deposition. Nanomaterials, 13(9), 1516 (14 pp.). https://doi.org/10.3390/nano13091516
Characterising the sticking coefficient of chemistries relevant for artificial solid electrolyte interphases
Lapeyre, L., Mackosz, K., Szmyt, W., Pethö, L., Michler, J., Raynaud, P., & Utke, I. (2023). Characterising the sticking coefficient of chemistries relevant for artificial solid electrolyte interphases. Presented at the EuroCVD/Baltic ALD 2023. Leuven.
Refractive index measurement of IP-S and IP-Dip photoresists at THz frequencies and validation via 3D photonic metamaterials made by direct laser writing
Mavrona, E., Theodosi, A., Mackosz, K., Perivolari, E., Utke, I., Michler, J., … Xomalis, A. (2023). Refractive index measurement of IP-S and IP-Dip photoresists at THz frequencies and validation via 3D photonic metamaterials made by direct laser writing. Optical Materials Express, 13(11), 3355 (10 pp.). https://doi.org/10.1364/OME.500287
Comparative study of focused electron &amp; ion beam induced deposition (Ga<sup>+</sup>, Xe<sup>+</sup>) with Cu(II)(hfac)<sub>2</sub>∙xH<sub>2</sub>O precursor
Maćkosz, K., Le Gal, P., Delobbe, A., Utke, I., & Goupil, G. (2023). Comparative study of focused electron & ion beam induced deposition (Ga+, Xe+) with Cu(II)(hfac)2∙xH2O precursor. Presented at the FIT4NANO workshop 2023. Lisbon.
Comprehensive study of the early growth stages of copper films
Maćkosz, K., Szkudlarek, A., Minzoni, C., Klejna, S., Figura, A., Kwiatkowski, A., … Utke, I. (2023). Comprehensive study of the early growth stages of copper films. Presented at the EUROCVD/Baltic ALD 2023. Leuven.
<em>In situ</em> testing of ultrathin diffusion barriers using complex multishell nanowires
Vogl, L. M., Schweizer, P., Maeder, X., Utke, I., Minor, A. M., & Michler, J. (2023). In situ testing of ultrathin diffusion barriers using complex multishell nanowires. Microscopy and Microanalysis, 29(1), 1585-1586. https://doi.org/10.1093/micmic/ozad067.815
From metal nanowires to ultrathin crystalline ALD nanotubes: process development and mechanism revealed by <em>in situ</em> TEM heating experiments
Vogl, L. M., Schweizer, P., Pethö, L., Sharma, A., Michler, J., & Utke, I. (2023). From metal nanowires to ultrathin crystalline ALD nanotubes: process development and mechanism revealed by in situ TEM heating experiments. Nanoscale, 15(21), 9477-9483. https://doi.org/10.1039/d3nr01185b
Structure dependent photoluminescence of colloidal PbS quantum dots in low refractive index dielectric 3D infrared metamaterials
Xomalis, A., Ferraresi, L. J. A., P. de G. Busquests, O., Maćkosz, K., Dirin, D. N., Utke, I., … Shorubalko, I. (2023). Structure dependent photoluminescence of colloidal PbS quantum dots in low refractive index dielectric 3D infrared metamaterials. In International congress on advanced electromagnetic materials in microwaves and optics (METAMATERIALS). 2023 seventeenth international congress on artificial materials for novel wave phenomena (metamaterials) (p. X-431-X-433). https://doi.org/10.1109/Metamaterials58257.2023.10289613
On the thinnest Al<sub>2</sub>O<sub>3</sub> interlayers in Al‐based nanolaminates to enhance strength, and the role of constraint
Edwards, T. E. J., Xie, T., della Ventura, N. M., Casari, D., Guerra, C., Huszár, E., … Michler, J. (2022). On the thinnest Al2O3 interlayers in Al‐based nanolaminates to enhance strength, and the role of constraint. Acta Materialia, 240, 118345 (15 pp.). https://doi.org/10.1016/j.actamat.2022.118345
In situ time-of-flight mass spectrometry of ionic fragments induced by focused electron beam irradiation: investigation of electron driven surface chemistry inside an SEM under high vacuum
Jurczyk, J., Pillatsch, L., Berger, L., Priebe, A., Madajska, K., Kapusta, C., … Utke, I. (2022). In situ time-of-flight mass spectrometry of ionic fragments induced by focused electron beam irradiation: investigation of electron driven surface chemistry inside an SEM under high vacuum. Nanomaterials, 12(15), 2710 (17 pp.). https://doi.org/10.3390/nano12152710
Vacuum versus ambient pressure inert gas thermogravimetry: a study of silver carboxylates
Jurczyk, J., Glessi, C., Madajska, K., Berger, L., Nyrud, J. I. K., Szymańska, I., … Utke, I. (2022). Vacuum versus ambient pressure inert gas thermogravimetry: a study of silver carboxylates. Journal of Thermal Analysis and Calorimetry, 147, 2187-2195. https://doi.org/10.1007/s10973-021-10616-6
Nucleation studies of copper ALD on SiO<sub>2</sub> and Si<sub>3</sub>N<sub>4</sub>
Maćkosz, K., Szkudlarek, A., & Utke, I. (2022). Nucleation studies of copper ALD on SiO2 and Si3N4. Presented at the ALD/ALE conference 2022. Ghent.
Mechanical properties of atomic-layer-deposited Al<sub>2</sub>O<sub>3</sub>/Y<sub>2</sub>O<sub>3 </sub>nanolaminate films on aluminum toward protective coatings
Niemelä, J. P., Putz, B., Mata-Osoro, G., Guerra-Nuñez, C., Widmer, R. N., Rohbeck, N., … Utke, I. (2022). Mechanical properties of atomic-layer-deposited Al2O3/Y2O3 nanolaminate films on aluminum toward protective coatings. ACS Applied Nano Materials, 5(5), 6285-6296. https://doi.org/10.1021/acsanm.2c00378
Synthesis of novel composite thin film systems with outstanding mechanical properties
Pethö, L., Guerra, C., Xie, T., Huszár, E., Edwards, T. E. J., Michler, J., … Utke, I. (2022). Synthesis of novel composite thin film systems with outstanding mechanical properties. Presented at the ALD/ALE conference 2022. Ghent.
Real-time in situ parallel detection of elements and molecules with TOFMS during ALD for chemical quality control of thin films
Priebe, A., Dousse, B., Tzou, C. Y., Papadopoulos, G., Utke, I., Bensaoula, A., … Guerra-Nuñez, C. (2022). Real-time in situ parallel detection of elements and molecules with TOFMS during ALD for chemical quality control of thin films. Journal of Physical Chemistry C, 126(4), 1901-1912. https://doi.org/10.1021/acs.jpcc.1c09544
Atomic layer deposition on porous substrates: from general formulation to fibrous substrates and scaling laws
Szmyt, W., Guerra-Nuñez, C., Huber, L., Dransfeld, C., & Utke, I. (2022). Atomic layer deposition on porous substrates: from general formulation to fibrous substrates and scaling laws. Chemistry of Materials, 34(1), 203-216. https://doi.org/10.1021/acs.chemmater.1c03164
 

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