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Continuum models of focused electron beam induced processing
Toth, M., Lobo, C., Friedli, V., Szkudlarek, A., & Utke, I. (2015). Continuum models of focused electron beam induced processing. Beilstein Journal of Nanotechnology, 6, 1518-1540. https://doi.org/10.3762/bjnano.6.157
Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems
Utke, I., Friedli, V., Amorosi, S., Michler, J., & Hoffmann, P. (2006). Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems. Microelectronic Engineering, 83(4-9), 1499-1502. https://doi.org/10.1016/j.mee.2006.01.136