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Deposition of functional plasma polymers influenced by reactor geometry in capacitively coupled discharges
Hegemann, D., Michlíček, M., Blanchard, N. E., Schütz, U., Lohmann, D., Vandenbossche, M., … Drábik, M. (2016). Deposition of functional plasma polymers influenced by reactor geometry in capacitively coupled discharges. Plasma Processes and Polymers, 13(2), 279-286. https://doi.org/10.1002/ppap.201500078