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Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al<sub>2</sub>O<sub>3</sub> films grown by thermal atomic layer deposition
Cancellieri, C., Gramatte, S., Politano, O., Lapeyre, L., Klimashin, F. F., Mackosz, K., … Jeurgens, L. P. H. (2024). Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al2O3 films grown by thermal atomic layer deposition. Surface and Interface Analysis. https://doi.org/10.1002/sia.7282
Concepts for chemical state analysis at constant probing depth by lab‐based XPS/HAXPES combining soft and hard X‐ray sources
Siol, S., Mann, J., Newman, J., Miyayama, T., Watanabe, K., Schmutz, P., … Jeurgens, L. P. H. (2020). Concepts for chemical state analysis at constant probing depth by lab‐based XPS/HAXPES combining soft and hard X‐ray sources. Surface and Interface Analysis, 52(12), 802-810. https://doi.org/10.1002/sia.6790