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  • (-) Publication Year = 2006 - 2019
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  • (-) Empa Authors = Nellen, Philipp M.
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FIB-milling of photonic structures and sputtering simulation
Nellen, P. M., Callegari, V., & Brönnimann, R. (2006). FIB-milling of photonic structures and sputtering simulation. Microelectronic Engineering, 83(4-9), 1805-1808. https://doi.org/10.1016/j.mee.2006.01.176