Cancellieri, C., Gramatte, S., Politano, O., Lapeyre, L., Klimashin, F. F., Mackosz, K., … Jeurgens, L. P. H. (2024). Effect of hydrogen on the chemical state, stoichiometry and density of amorphous Al2O3 films grown by thermal atomic layer deposition. Surface and Interface Analysis. https://doi.org/10.1002/sia.7282