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In-situ monitoring of gas-assisted focused ion beam and focused electron beam induced processing
Utke, I., Gabureac, M., Friedli, V., Bernau, L., & Michler, J. (2010). In-situ monitoring of gas-assisted focused ion beam and focused electron beam induced processing. Journal of physics: conference series: Vol. 241. (p. 012072 (6 pp.). Presented at the Electron microscopy and analysis group conference 2009 (EMAG 2009). https://doi.org/10.1088/1742-6596/241/1/012072