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Development of a tape casting process for making thin layers of Si<SUB>3</SUB>N<SUB>4</SUB> and Si<SUB>3</SUB>N<SUB>4</SUB> + TiN
Blugan, G., Morawa, K., Koebel, S., Graule, T., & Kuebler, J. (2007). Development of a tape casting process for making thin layers of Si3N4 and Si3N4 + TiN. Journal of the European Ceramic Society, 27(16), 4789-4795. https://doi.org/10.1016/j.jeurceramsoc.2007.02.211
Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections
Payling, R., Michler, J., & Aeberhard, M. (2002). Quantitative analysis of conductive coatings by radiofrequency-powered glow discharge optical emission spectrometry: hydrogen, d.c. bias voltage and density corrections. Surface and Interface Analysis, 33(6), 472-477. https://doi.org/10.1002/sia.1233