Parlinska-Wojtan, M., Meier, S., & Patscheider, J. (2010). Transmission electron microscopy characterization of TiN/SiNx multilayered coatings plastically deformed by nanoindentation. Thin Solid Films, 518(17), 4890-4897. https://doi.org/10.1016/j.tsf.2010.02.064