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The Si<sub>3</sub>N<sub>4</sub>/TiN interface: 6. Si/TiN(001) grown and analyzed <em>in situ</em> using angle-resolved X-ray photoelectron spectroscopy
Haasch, R. T., Patscheider, J., Hellgren, N., Petrov, I., & Greene, J. E. (2012). The Si3N4/TiN interface: 6. Si/TiN(001) grown and analyzed in situ using angle-resolved X-ray photoelectron spectroscopy. Surface Science Spectra, 19(1), 82-91. https://doi.org/10.1116/11.20121006