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Microstructure and mechanical properties of Al-Si-N transparent hard coatings deposited by magnetron sputtering
Pélisson, A., Parlinska-Wojtan, M., Hug, H. J., & Patscheider, J. (2007). Microstructure and mechanical properties of Al-Si-N transparent hard coatings deposited by magnetron sputtering. Surface and Coatings Technology, 202(4-7), 884-889. https://doi.org/10.1016/j.surfcoat.2007.05.094