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Determining the stress-strain behaviour of small devices by nanoindentation in combination with inverse methods
Stauss, S., Schwaller, P., Bucaille, J. L., Rabe, R., Rohr, L., Michler, J., & Blank, E. (2003). Determining the stress-strain behaviour of small devices by nanoindentation in combination with inverse methods. Microelectronic Engineering, 67-68, 818-825. https://doi.org/10.1016/S0167-9317(03)00192-8