Navascués, P., Buchtelová, M., Zajícková, L., Rupper, P., & Hegemann, D. (2024). Polymerization mechanisms of hexamethyldisiloxane in low-pressure plasmas involving complex geometries. Applied Surface Science, 645, 158824 (9 pp.). https://doi.org/10.1016/j.apsusc.2023.158824