Experimental evaluation of the impact of EUV pellicles on reticle imaging

Mochi I, Timmermans M, Gallagher E, Mariano M, Pollentier I, Rajeev R, Helfenstein P, Fernandez S, Kazazis D & Ekinci Y
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Mochi, I., Timmermans, M., Gallagher, E., Mariano, M., Pollentier, I., Rajeev, R., … Ekinci, Y. (2018). Experimental evaluation of the impact of EUV pellicles on reticle imaging. In E. E. Gallagher & J. H. Rankin (Eds.), Proceedings of SPIE: Vol. 10810. Photomask technology 2018 (p. 108100Y (9 pp.). https://doi.org/10.1117/12.2502480