High-resolution EUV lithography using a multi-trigger resist

Popescu C, Kazazis D, McClelland A, Dawson G, Roth J, Theis W, Ekinci Y & Robinson APG
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Popescu, C., Kazazis, D., McClelland, A., Dawson, G., Roth, J., Theis, W., … Robinson, A. P. G. (2018). High-resolution EUV lithography using a multi-trigger resist. In K. A. Goldberg (Ed.), Proceedings of SPIE: Vol. 10583. Extreme ultraviolet (EUV) lithography IX (p. 105831L (10 pp.). https://doi.org/10.1117/12.2297406