Ultra-sensitive EUV resists based on acid-catalyzed polymer backbone breaking

Manouras T, Kazazis D, Koufakis E, Ekinci Y, Vamvakaki M & Argitis P
Choose the citation style.
Manouras, T., Kazazis, D., Koufakis, E., Ekinci, Y., Vamvakaki, M., & Argitis, P. (2018). Ultra-sensitive EUV resists based on acid-catalyzed polymer backbone breaking. In K. A. Goldberg (Ed.), Proceedings of SPIE: Vol. 10583. SPIE advanced lithography (p. 105831R (10 pp.). https://doi.org/10.1117/12.2299853