A compact high-brightness accelerator-based EUV source for actinic mask inspection

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Ekinci, Y., Garvey, T., Rivkin, L., Streun, A., & Wrulich, A. (2018). A compact high-brightness accelerator-based EUV source for actinic mask inspection. In Compact EUV & X-ray light sources. High-brightness sources and light-driven interactions (p. ET3B.5 (2 pp.). https://doi.org/10.1364/EUVXRAY.2018.ET3B.5