Dynamics of reactive sputtering affecting phase formation of Co–N thin films

Pandey N, Gupta M, Gupta R, Amir SM & Stahn J
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Pandey, N., Gupta, M., Gupta, R., Amir, S. M., & Stahn, J. (2019). Dynamics of reactive sputtering affecting phase formation of Co–N thin films. Applied Physics A: Materials Science and Processing, 125(8), 539 (8 pp.). https://doi.org/10.1007/s00339-019-2825-0