Freestanding carbon nanomembranes and graphene monolayers nanopatterned via EUV interference lithography

Winter A, Ekinci Y, Gölzhäuser A & Turchanin A
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Winter, A., Ekinci, Y., Gölzhäuser, A., & Turchanin, A. (2019). Freestanding carbon nanomembranes and graphene monolayers nanopatterned via EUV interference lithography. 2D Materials, 6(2), 021002 (8 pp.). https://doi.org/10.1088/2053-1583/ab0014