Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom

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Holler, M., Odstrcil, M., Guizar-Sicairos, M., Lebugle, M., Müller, E., Finizio, S., … Aeppli, G. (2019). Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom. Nature Electronics, 2, 464-470. https://doi.org/10.1038/s41928-019-0309-z