Single-digit 6-nm multilevel patterns by electron beam grayscale lithography

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Kirchner, R., Guzenko, V. A., & Schift, H. (2019). Single-digit 6-nm multilevel patterns by electron beam grayscale lithography. Advanced Optical Technologies, 8(3-4), 175-180. https://doi.org/10.1515/aot-2019-0016