Hybrid EUV resists with mixed organic shells: a simple preparation method

Wu L, Liu J, Vockenhuber M, Ekinci Y & Castellanos S
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Wu, L., Liu, J., Vockenhuber, M., Ekinci, Y., & Castellanos, S. (2019). Hybrid EUV resists with mixed organic shells: a simple preparation method. European Journal of Inorganic Chemistry, 2019(38), 4136-4141. https://doi.org/10.1002/ejic.201900745