In situ oxidation studies of Cu thin films: growth kinetics and oxide phase evolution

Unutulmazsoy Y, Cancellieri C, Chiodi M, Siol S, Lin L & Jeurgens LPH
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Unutulmazsoy, Y., Cancellieri, C., Chiodi, M., Siol, S., Lin, L., & Jeurgens, L. P. H. (2020). In situ oxidation studies of Cu thin films: growth kinetics and oxide phase evolution. Journal of Applied Physics, 127(6), 065101 (11 pp.). https://doi.org/10.1063/1.5131516