UV illumination for electron and ion beam microscopy and nanofabrication

Ng SH, Seniutinas G, Ryu M, Katkus T, Le NHA, Stoddart P, Morikawa J & Juodkazis S
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Ng, S. H., Seniutinas, G., Ryu, M., Katkus, T., Le, N. H. A., Stoddart, P., … Juodkazis, S. (2019). UV illumination for electron and ion beam microscopy and nanofabrication. In G. Lérondel, Y. H. Cho, A. Taguchi, & S. Kawata (Eds.), Proceedings of SPIE: Vol. 11086. UV and higher energy photonics: from materials to applications 2019 (p. 110860U (5 pp.). https://doi.org/10.1117/12.2528681