The effect of 130 keV N2+ ion implantation post-treatment on the micro- and nanostructure of sputtered chromium nitride thin films

Louring S, Rechendorff K, Almtoft KP, Watts B, Jeppesen CS, Christensen BH & Nielsen LP
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Louring, S., Rechendorff, K., Almtoft, K. P., Watts, B., Jeppesen, C. S., Christensen, B. H., & Nielsen, L. P. (2020). The effect of 130 keV N2+ ion implantation post-treatment on the micro- and nanostructure of sputtered chromium nitride thin films. Surface and Coatings Technology, 389, 125635 (7 pp.). https://doi.org/10.1016/j.surfcoat.2020.125635