Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics

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Romano, L., Kagias, M., Vila-Comamala, J., Jefimovs, K., Tseng, L. T., Guzenko, V. A., & Stampanoni, M. (2020). Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics. Nanoscale Horizons, 5(5), 869-879. https://doi.org/10.1039/C9NH00709A