High‐aspect‐ratio grating microfabrication by platinum‐assisted chemical etching and gold electroplating

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Romano, L., Vila-Comamala, J., Jefimovs, K., & Stampanoni, M. (2020). High‐aspect‐ratio grating microfabrication by platinum‐assisted chemical etching and gold electroplating. Advanced Engineering Materials, 22(10), 2000258 (10 pp.). https://doi.org/10.1002/adem.202000258