Anisotropic etching of pyramidal silica reliefs with metal masks and hydrofluoric acid

Kirchner R, Neumann V, Winkler F, Strobel C, Völkel S, Hiess A, Kazazis D, Künzelmann U & Bartha JW
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Kirchner, R., Neumann, V., Winkler, F., Strobel, C., Völkel, S., Hiess, A., … Bartha, J. W. (2020). Anisotropic etching of pyramidal silica reliefs with metal masks and hydrofluoric acid. Small, 16(43), 2002290 (7 pp.). https://doi.org/10.1002/smll.202002290