Complementary characterization method of 3D arsenic doping by using medium energy ion scattering

Penlap Woguia L, Pierre F, Sanchez DF, Marmitt GG, Saghi Z & Jalabert D
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Penlap Woguia, L., Pierre, F., Sanchez, D. F., Marmitt, G. G., Saghi, Z., & Jalabert, D. (2021). Complementary characterization method of 3D arsenic doping by using medium energy ion scattering. Journal of Physics Communications, 5(1), 015017 (9 pp.). https://doi.org/10.1088/2399-6528/abbdcf