Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy

Wu L, Bespalov I, Witte K, Lugier O, Haitjema J, Vockenhuber M, Ekinci Y, Watts B, Brouwer AM & Castellanos S
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Wu, L., Bespalov, I., Witte, K., Lugier, O., Haitjema, J., Vockenhuber, M., … Castellanos, S. (2020). Unravelling the effect of fluorinated ligands in hybrid EUV photoresists by X-ray spectroscopy. Journal of Materials Chemistry C, 8(42), 14757-14765. https://doi.org/10.1039/d0tc03216f