A priori information in ptychographic image reconstruction for EUV mask metrology

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Nebling, R., Mochi, I., Kim, Hsu, Dejkameh, A., Shen, T., & Ekinci, Y. (2021). A priori information in ptychographic image reconstruction for EUV mask metrology. In R. Nebling, I. Mochi, Hsu Kim, A. Dejkameh, T. Shen, Y. Ekinci, … A. Erdmann (Eds.), Proceedings of SPIE: Vol. 11875. Computational optics 2021 (p. 118750M (8 pp.). https://doi.org/10.1117/12.2600233