Changes in the near edge x-ray absorption fine structure of hybrid organic-inorganic resists upon exposure

Fallica R, Watts B, Rösner B, Della Giustina G, Brigo L, Brusatin G & Ekinci Y
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Fallica, R., Watts, B., Rösner, B., Della Giustina, G., Brigo, L., Brusatin, G., & Ekinci, Y. (2018). Changes in the near edge x-ray absorption fine structure of hybrid organic-inorganic resists upon exposure. Nanotechnology, 29(36), 36LT03 (6 pp.). https://doi.org/10.1088/1361-6528/aaccd4