Finfet with fully PH-responsive HFO2 as highly stable biochemical sensor

Rigante S, Wipf M, Bazigos A, Bedner K, Bouvet D & Ionescu AM
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Rigante, S., Wipf, M., Bazigos, A., Bedner, K., Bouvet, D., & Ionescu, A. M. (2014). Finfet with fully PH-responsive HFO2 as highly stable biochemical sensor. In IEEE international conference on micro electro mechanical systems. 2014 IEEE 27th international conference on micro electro mechanical systems (MEMS) (pp. 1063-1066). https://doi.org/10.1109/MEMSYS.2014.6765828
https://www.dora.lib4ri.ch/psi/islandora/object/psi:66156

In this work, highly scaled FinFETs (Fin Field Effect Transistors) are proposed as both sensing and circuit units of a lab-on-a-chip platform. The FinFET-based sensors with an HfO2 gate oxide demonstrate full pH-response with ΔVth ≈ 56 mV/pH. High readout sensitivity Sout = ΔId/Id ≈ 43% is achieved in combination with excellent device electronic properties, i.e. SS = 77 mV/dec and Ion/Ioff =1.5×106. High long-term stability is proven over 4.5 days with a drift in time limited at 0.14 mV/h.

Details
Publication Type

Proceedings Paper

Title

Finfet with fully PH-responsive HFO2 as highly stable biochemical sensor

Author(s)

Rigante, S.

Wipf, M.

Bazigos, A.

Bedner, K. (6212 X-ray Optics and Applications)

Bouvet, D.

Ionescu, A.M.

Conference Proceedings

2014 IEEE 27th international conference on micro electro mechanical systems (MEMS)

Editor(s)

(editor)

Series Title

IEEE international conference on micro electro mechanical systems

Publisher

IEEE

Start Page

1063

End Page

1066

Publication Year

2014

Conference

2014 IEEE 27th international conference on micro electro mechanical systems (MEMS)

Conference Date

January 26-30, 2014

Collection

PSI Publications