Line density measurement of a spherical variable line space diffraction grating with a long trace profiler

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Flechsig, U., Lavazza, A., & Spielmann-Jäggi, S. (2024). Line density measurement of a spherical variable line space diffraction grating with a long trace profiler. In C. Morawe, H. Mimura, & A. M. Khounsary (Eds.), Proceedings of SPIE: Vol. 13150. Advances in X-Ray/EUV optics and components XIX 2024 (p. 1315005 (6 pp.). https://doi.org/10.1117/12.3025639