Fabrication of Fresnel zone plates with 25 nm zone width using extreme ultraviolet holography

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Sarkar, S. S., Solak, H. H., Raabe, J., David, C., & van der Veen, J. F. (2010). Fabrication of Fresnel zone plates with 25 nm zone width using extreme ultraviolet holography. Microelectronic Engineering, 87(5-8), 854-858. https://doi.org/10.1016/j.mee.2009.12.053