Characterisation of size distribution and positional misalignment of nanoscale islands by small-angle X-ray scattering

Heldt G, Thompson P, Chopdekar RV, Kohlbrecher J, Lee S, Heyderman LJ & Thomson T
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Heldt, G., Thompson, P., Chopdekar, R. V., Kohlbrecher, J., Lee, S., Heyderman, L. J., & Thomson, T. (2019). Characterisation of size distribution and positional misalignment of nanoscale islands by small-angle X-ray scattering. Journal of Applied Physics, 125(1), 014301 (8 pp.). https://doi.org/10.1063/1.5050882