High aspect ratio nanostructuring by high energy electrons and electroplating

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Gorelick, S., Vila-Comamala, J., Guzenko, V. A., & David, C. (2011). High aspect ratio nanostructuring by high energy electrons and electroplating. Microelectronic Engineering, 88(8), 2259-2262. https://doi.org/10.1016/j.mee.2011.02.094