Extreme ultraviolet patterning of tin-oxo cages

Haitjema J, Zhang Y, Vockenhuber M, Kazazis D, Ekinci Y & Brouwer AM
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Haitjema, J., Zhang, Y., Vockenhuber, M., Kazazis, D., Ekinci, Y., & Brouwer, A. M. (2017). Extreme ultraviolet patterning of tin-oxo cages. K. A. Goldberg & E. M. Panning (Eds.), Proceedings of SPIE - the international society for optical engineering: Vol. 10143. . Presented at the Extreme ultraviolet (EUV) lithography VIII 2017. https://doi.org/10.1117/12.2257911