Extreme ultraviolet patterning of tin-oxo cages

Haitjema J, Zhang Y, Vockenhuber M, Kazazis D, Ekinci Y & Brouwer AM
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Haitjema, J., Zhang, Y., Vockenhuber, M., Kazazis, D., Ekinci, Y., & Brouwer, A. M. (2017). Extreme ultraviolet patterning of tin-oxo cages. In E. M. Panning & K. A. Goldberg (Eds.), Proceedings of SPIE: Vol. 10143. Extreme Ultraviolet (EUV) lithography VIII. https://doi.org/10.1117/12.2257911