In situ stress measurements of metal oxide thin films

Fluri, A.; Schneider, C.W.; Pergolesi, D.

doi:10.1016/B978-0-12-811166-6.00005-4

In situ stress measurements of metal oxide thin films

Citation

Fluri, A., Schneider, C. W., & Pergolesi, D. (2018). In situ stress measurements of metal oxide thin films. In N. Pryds & V. Esposito (Eds.), Metal oxides. Metal oxide-based thin film structures. Formation, characterization, and application of interface-based phenomena (pp. 109-132). https://doi.org/10.1016/B978-0-12-811166-6.00005-4

Persistent URL https://www.dora.lib4ri.ch/psi/islandora/object/psi:35842

Details

Publication Type

Book Chapter

Title

In situ stress measurements of metal oxide thin films

Author(s)

Fluri, A. (3702 Thin Films and Interfaces)

Schneider, C.W. (3702 Thin Films and Interfaces)

Pergolesi, D. (3702 Thin Films and Interfaces)

Book Title