Laser-induced breakdown spectroscopy (LIBS) is a well-established elemental analysis method, thanks to negligible sample preparation, rapid analysis, and a spatially resolved sensitivity down to trace level, in any kind of matrix. State-of-the-art LIBS is operated in the optical spectral range (UV-VIS). Unfortunately, the measurement precision is limited by the moderate stability and repeatability of the plasma emission. The detection and sensitivity to crucial elements such as light elements and halogens are also limited. This is particularly critical for inhomogeneous materials where signal fluctuation is related to the spatial elemental distribution. To overcome these disadvantages specific, LIBS techniques arrangement are often required. Laser-induced XUV Spectroscopy (LIXS) has some intrinsic advantages for overcoming some of the above mentioned limitations and it can support the spectroscopic information collected in the UV-VIS range.