High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication

Romano L, Vila-Comamala J, Kagias M, Vogelsang K, Schift H, Stampanoni M & Jefimovs K
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Romano, L., Vila-Comamala, J., Kagias, M., Vogelsang, K., Schift, H., Stampanoni, M., & Jefimovs, K. (2017). High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication. Microelectronic Engineering, 176, 6-10. https://doi.org/10.1016/j.mee.2016.12.032