Structural properties of Al-O monolayers in SiO2 on silicon and the maximization of their negative fixed charge density

Hiller D, Göttlicher J, Steininger R, Huthwelker T, Julin J, Munnik F, Wahl M, Bock W, Schoenaers B, Stesmans A & König D
Choose the citation style.
Hiller, D., Göttlicher, J., Steininger, R., Huthwelker, T., Julin, J., Munnik, F., … König, D. (2018). Structural properties of Al-O monolayers in SiO2 on silicon and the maximization of their negative fixed charge density. ACS Applied Materials and Interfaces, 10(36), 30495-30505. https://doi.org/10.1021/acsami.8b06098