Nonchemically amplified molecular resists based on sulfonium-functionalized sulfone derivatives for sub-13 nm nanolithography
Wang Y, Chen J, Zeng Y, Yu T, Wang S, Guo X, Hu R, Tian P, Vockenhuber M, Kazazis D, Ekinci Y, Wu Y, Yang S, Zhao J, Yang G & Li Y
Wang, Y., Chen, J., Zeng, Y., Yu, T., Wang, S., Guo, X., … Li, Y. (2023). Nonchemically amplified molecular resists based on sulfonium-functionalized sulfone derivatives for sub-13 nm nanolithography. ACS Applied Nano Materials, 6(19), 18480-18490. https://doi.org/10.1021/acsanm.3c03900