Soft X-ray absorption and fragmentation of tin-oxo cage photoresists

Haitjema J, Castellanos S, Lugier O, Bespalov I, Lindblad R, Timm M, Bülow C, Zamudio-Bayer V, Lau JT, von Issendorff B, Hoekstra R, Witte K, Watts B, Schlathölter T & Brouwer AM
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Haitjema, J., Castellanos, S., Lugier, O., Bespalov, I., Lindblad, R., Timm, M., … Brouwer, A. M. (2024). Soft X-ray absorption and fragmentation of tin-oxo cage photoresists. Physical Chemistry Chemical Physics, 26(7), 5986-5998. https://doi.org/10.1039/d3cp05428d