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Towards a stand-alone high-throughput EUV actinic photomask inspection tool: RESCAN
Rajendran, R., Mochi, I., Helfenstein, P., Mohacsi, I., Redford, S., Mozzanica, A., … Ekinci, Y. (2017). Towards a stand-alone high-throughput EUV actinic photomask inspection tool: RESCAN. In M. I. Sanchez & V. A. Ukraintsev (Eds.), Proceedings of SPIE: Vol. 10145. Metrology, inspection, and process control for microlithography XXXI (p. 101450N). https://doi.org/10.1117/12.2258379
Size-dependent shape evolution of patterned polymer films studied in situ by phase-retrieval-based small-angle X-ray scattering
Nygård, K., Delcambre, S. P., Satapathy, D. K., Bunk, O., Nealey, P. F., & van der Veen, J. F. (2012). Size-dependent shape evolution of patterned polymer films studied in situ by phase-retrieval-based small-angle X-ray scattering. Macromolecules, 45(14), 5798-5805. https://doi.org/10.1021/ma300662s