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Bend the curve – shape optimization in laser grayscale direct write lithography using a single figure of merit
Collé, D., Erjawetz, J., Ekindorf, G., Heyl, P., Ritter, D., Reddy, A., & Schift, H. (2022). Bend the curve – shape optimization in laser grayscale direct write lithography using a single figure of merit. Micro and Nano Engineering, 15, 100137 (9 pp.). https://doi.org/10.1016/j.mne.2022.100137
Metal micro-forming of AA5052 using high-durable glassy carbon mold for efficient boiling heat transfer
Kim, J., Lee, S., Asgar, M. A., Haq, M. R., & Kim, Smin. (2022). Metal micro-forming of AA5052 using high-durable glassy carbon mold for efficient boiling heat transfer. International Journal of Precision Engineering and Manufacturing - Green Technology (13 pp.). https://doi.org/10.1007/s40684-022-00439-7
Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating
Shi, Z., Josell, D., Jefimovs, K., Romano, L., Moffat, T. P., Stampanoni, M., & Schleputz, C. M. (2022). Fabrication of a fractal pattern device for focus characterizations of X-ray imaging systems by Si deep reactive ion etching and bottom-up Au electroplating. Applied Optics, 61(13), 3850-3854. https://doi.org/10.1364/AO.456427
High aspect ratio tilted gratings through local electric field modulation in plasma etching
Shi, Z., Jefimovs, K., La Magna, A., Stampanoni, M., & Romano, L. (2022). High aspect ratio tilted gratings through local electric field modulation in plasma etching. Applied Surface Science, 588, 152938 (10 pp.). https://doi.org/10.1016/j.apsusc.2022.152938
Voltage-controlled three-electron-beam interference by a three-element Boersch phase shifter with top and bottom shielding electrodes
Thakkar, P., Guzenko, V. A., Lu, P. H., Dunin-Borkowski, R. E., Abrahams, J. P., & Tsujino, S. (2021). Voltage-controlled three-electron-beam interference by a three-element Boersch phase shifter with top and bottom shielding electrodes. In S. Purcell & J. P. Mazellier (Eds.), International conference on vacuum nanoelectronics (IVNC). 2021 34th international vacuum nanoelectronics conference (IVNC) (p. 21299961 (2 pp.). https://doi.org/10.1109/IVNC52431.2021.9600711