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In situ stress measurements of metal oxide thin films
Fluri, A., Schneider, C. W., & Pergolesi, D. (2018). In situ stress measurements of metal oxide thin films. In N. Pryds & V. Esposito (Eds.), Metal oxides. Metal oxide-based thin film structures. Formation, characterization, and application of interface-based phenomena (pp. 109-132). https://doi.org/10.1016/B978-0-12-811166-6.00005-4