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Investigation of the Young's modulus and the residual stress of 4H-SiC circular membranes on 4H-SiC substrates
Messaoud, J. B., Michaud, J. F., Certon, D., Camarda, M., Piluso, N., Colin, L., … Alquier, D. (2019). Investigation of the Young's modulus and the residual stress of 4H-SiC circular membranes on 4H-SiC substrates. Micromachines, 10(12), 801 (12 pp.). https://doi.org/10.3390/mi10120801